Wafer-scale growth of low-density, O-band InAs quantum dots on GaAs for single-photon sources
Researchers report a way to grow tiny light-emitting islands called quantum dots on standard GaAs wafers so they emit in the telecom O‑band (around 1.3 micrometres). Quantum dots are nanoscale semiconductor crystals that can emit single photons, which are useful for quantum communication. The team developed a molecular beam epitaxy (MBE) recipe — a method that deposits atoms layer by layer — to make these dots at low density across a 2‑inch GaAs(001) wafer. Low density means it is easier to address single dots for devices.
The growth method combines several controlled steps. The authors deposit a thin, patterned 15 nm GaAs “pattern‑defining layer” to modulate surface roughness and then add InAs in a gradient across the wafer in the sub‑monolayer regime (they explored total InAs coverages from about 1.6 to 2.8 monolayers). Depositions were done at temperatures between about 480 and 550 °C with short InAs growth pulses (example pulse time 3 s and arsenic pauses ranging from 3 to 51 s). After forming the dots, they cap them with either 10 nm GaAs or a 7 nm In0.29Ga0.71As “strain‑reducing layer” (a thin alloy layer that relaxes strain and shifts the emission to longer wavelengths). By synchronizing the InAs deposition cycles with the substrate rotation, the team controlled where dots nucleate and produced large regions with very low dot densities (<1 dot per µm2, i.e. <108 cm−2).
They studied the optical and structural properties with several techniques. Photoluminescence (PL) mapping at low temperature tracked where and how strongly dots emit. Hyperspectral imaging allowed them to map the position and emission wavelength of more than 500 individual dots in the low‑density regions. Atomic force microscopy (AFM), scanning transmission electron microscopy (STEM) and energy‑dispersive X‑ray spectroscopy (EDX) were used to look at dot shape and composition at the atomic scale.